Chinese Researchers Achieve Breakthrough in Deep UV Laser Technology (March 26, 2025)
Scientists at the Chinese Academy of Sciences developed a compact solid-state laser system generating a 193 nm coherent vortex beam with improved coherence and reduced power consumption. Using a homemade Yb:YAG crystal amplifier, the system outputs 1030 nm laser light, which is frequency converted through cascaded LBO crystals to produce 193 nm laser with 70 mW average power and linewidth under 880 MHz. This advancement is crucial for photolithography and other precision manufacturing applications.
News Link: https://optics.org/news/16/3/41
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